Multi beam hybrid heterodyne interferometry based phase enhancement technology
نویسندگان
چکیده
منابع مشابه
Highspeed multiplexed heterodyne interferometry.
Digitally enhanced heterodyne interferometry is a metrology technique that uses pseudo-random noise codes for modulating the phase of the laser light. Multiple interferometric signals from the same beam path can thereby be isolated based on their propagation delay, allowing one to use advantageous optical layouts in comparison to classic laser interferometers. We present here a high speed versi...
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ژورنال
عنوان ژورنال: Acta Physica Sinica
سال: 2020
ISSN: 1000-3290
DOI: 10.7498/aps.69.20200281